Proof-of-Concept to Production

MEMS Foundry Services Offered

PECVD SiOxNy
LPCVD Si3N4
LPCVD SiRN
Metal PVD
ZnO PVD
DRIE etching
DRIE of borosilicate glass
KOH etching
Anodic bonding
Direct / fusion bonding

Providing single step foundry services as well as processing of complex structures and components. Private cleanroom facilities & equipment for proprietary technologies.

All processes performed on 100 mm silicon, SOI, borosilicate, fused silica and other substrates. Work is performed with carefully selected wafer manufacturers, providing flexibility with single/double side polished, options on doping levels, roughness, bow/warp etc. Or, we can work with your own wafers, blank or processed.

Regardless of your device need or your design requirement.... call NanoSciences today to discuss your project, and our capabilities !

NanoSciences, Inc.

Phone: 949-280-3045

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